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AMAG7 Hardmask Holes, 100 nm depth SiO2 on Si, C60P120 anchor target

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Product details

Management number 211261070 Release Date 2026/04/04 List Price US$36.00 Model Number 211261070
Category

AMAG7 module, featuring holes and trenches etched into 100 nm deep SiO2, terminating on Si substrate. The anchor target is C60P120, with larger hole sizes and trenches also patterning successfully.

Brand AMAG nanometro
Manufacturer AMAG nanometro

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